Frequency measuring transducers based on the piezoresonance oscillator systems with external MEMS control

The paper represents the mathematical model of piezoresonance oscillator system (POS), which consists of highquality elementquartz resonator (QR), the element of connection and lowquality loading. Based on analyses of main characteristics of POS in the system of MatLab, the conditions of minimization of negative impact of lowquality loading onto personal characteristics of QR are defined. The new class of frequencycompensated piezoresonance oscillation systems (FCPOS) based on the systems of automated frequency control (AFC) is proposed. On the example of measuring transducer of humidity of the discrete substances, the peculiarities of building and optimization of characteristics of primary measuring transducers (PMT) “physical parameterfrequency” based on FCPOS are studied. The possibility of increasing the linearity of converting of PMT of present type by means of applying matrix MEMStransducers, which allows realizing the multilevel mode of control over the elements of connections of FCPOS, is shown.